Wafer-scale monolayer dielectric integration on atomically thin semiconductors
- Journal:
- Nature Materials
- Published:
- Affiliations:
- 2
- Authors:
- 7
| Institutions | Authors | Share |
|---|---|---|
| State Key Laboratory of Integrated Chip and System, Fudan University, China | 0.93 | |
| Shaoxin Laboratory, China | 0.07 |