Two-dimensional crystalline hard masks for high-aspect-ratio nanofabrication

Journal:
Nature Materials
Published:
DOI:
10.1038/s41563-026-02524-7
Affiliations:
6
Authors:
9
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Institutions Authors Share
The Pennsylvania State University (Penn State), United States of America (USA)
7.000000
 0.78
University of Chemistry and Technology, Prague (UCT), Czech Republic
2.000000
 0.22
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