Monolithic three-dimensional integration of silicon transistors

Journal:
Nature
Published:
DOI:
10.1038/s41586-026-10496-6
Affiliations:
6
Authors:
8
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Institutions Authors Share
University of Illinois at Urbana-Champaign (UIUC), United States of America (USA)
7.133333
 0.89
Frederick Seitz Materials Research Laboratory (FS-MRL), UIUC, United States of America (USA)
0.533333
 0.07
Monash University, Australia
0.333333
 0.04
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