Low temperature atomic layer deposition of boron nitride using the iin situ/i decomposition of ammonium carbamate

Journal:

Chemical Communications

Published:

2025-07-31

DOI:

10.1039/d5cc02613j

Affiliations:

5

Authors:

6

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Institutions	Authors	Share
CIC nanoGUNE Consolider, Spain	2.500000	0.42
Nikolaev Institute of Inorganic Chemistry (NIIC), SB RAS, Russia	2.000000	0.33
Center of Materials Physics (CFM), Spain	1.000000	0.17
University of the Basque Country (UPV/EHU), Spain	0.500000	0.08
Ikerbasque - Basque Foundation for Science, Spain	0.000000	0.00

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