Brookite-phase vanadium (IV) oxide formation for semiconductor-to-metal transition free bolometric membrane via atomic layer deposition technique

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0251940
Affiliations:
4
Authors:
10
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Institutions Authors Share
Kyung Hee University (KHU), South Korea
4.000000
 0.40
Hanwha Intelligence Inc., South Korea
3.000000
 0.30
ISAC Research Inc., South Korea
2.000000
 0.20
Seoul National University (SNU), South Korea
1.000000
 0.10
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