Enhancement of drain soft-breakdown strength to 1.1 MV/cm for hydrogen-terminated diamond MOSFETs by mitigating hydrogen-induced defects

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0255922
Affiliations:
3
Authors:
9
Institutions Authors Share
University of Electronic Science and Technology of China (UESTC), China
6.000000
0.67
Nanjing Electronic Devices Institute (CETC55), China
3.000000
0.33