Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0260219
Affiliations:
3
Authors:
5
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Institutions Authors Share
WPI International Center for Materials Nanoarchitectonics (WPI-MANA), NIMS, Japan
3.000000
 0.60
National Institute for Materials Science (NIMS), Japan
1.000000
 0.20
Tanaka Kikinzoku Kogyo K. K., Japan
1.000000
 0.20
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