Oxygen plasma induced improvement of contact resistance and mobility of tellurium field-effect transistor
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0260965
- Affiliations:
- 1
- Authors:
- 9
| Institutions | Authors | Share |
|---|---|---|
| Fujian Key Laboratory of Semiconductor Materials and Applications, XMU, China | 1.00 |