Membrane phononic crystals for high-Qm mechanical defect modes at MHz frequencies in piezoelectric aluminum nitride
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0262362
- Affiliations:
- 2
- Authors:
- 7
| Institutions | Authors | Share |
|---|---|---|
| Chalmers University of Technology (Chalmers), Sweden | 0.71 | |
| Otto-von-Guericke University Magdeburg (OVGU), Germany | 0.29 |