Membrane phononic crystals for high-Qm mechanical defect modes at MHz frequencies in piezoelectric aluminum nitride

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0262362
Affiliations:
2
Authors:
7
Institutions Authors Share
Chalmers University of Technology (Chalmers), Sweden
5.000000
0.71
Otto-von-Guericke University Magdeburg (OVGU), Germany
2.000000
0.29