Hydrophilic direct bonding of (100) diamond and deposited SiO2 substrates
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0263008
- Affiliations:
- 2
- Authors:
- 4
| Institutions | Authors | Share |
|---|---|---|
| Delft University of Technology (TU Delft), Netherlands | 0.88 | |
| QuTech Advanced Research Centre, Netherlands | 0.13 |