Low-temperature microwave annealing stabilizes the morphotropic phase boundary in HfO2/ZrO2 superlattice heterostructures

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0264349
Affiliations:
3
Authors:
10
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Institutions Authors Share
National Tsing Hua University (NTHU), Taiwan
8.000000
 0.80
Taiwan Semiconductor Research Institute (TSRI), Taiwan
2.000000
 0.20
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