Oxygen migration impact on ferroelectric evolution in Hf0.5Zr0.5O2 devices

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0266238
Affiliations:
3
Authors:
7
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Institutions Authors Share
National Yang Ming Chiao Tung University (NYCU), Taiwan
6.000000
 0.86
National Synchrotron Radiation Research Center (NSRRC), Taiwan
1.000000
 0.14
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