Sub-100 Ω/□ sheet resistance of GaN HEMT with ScAlN barrier

Journal:

Applied Physics Letters

Published:

2025-08-04

DOI:

10.1063/5.0266966

Affiliations:

2

Authors:

11

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Institutions	Authors	Share
University of Michigan (U-M), United States of America (USA)	11.000000 11.000000	1.00

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