Thickness dependence of the electro-optic properties in epitaxial Hf0.5Zr0.5O2 thin films: Evident response down to 3 nm

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0267559
Affiliations:
3
Authors:
8
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Institutions Authors Share
Nagoya University, Japan
4.500000
 0.56
Kyoto University, Japan
3.000000
 0.38
Institute of Science Tokyo (Science Tokyo), Japan
0.500000
 0.06
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