In situ measurement of AlxGa1−xAs growth rate and composition by magnification inferred curvature method
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0268846
- Affiliations:
- 1
- Authors:
- 6
| Institutions | Authors | Share |
|---|---|---|
| Laboratory of Analysis and Architecture of Systems (LAAS), France | 1.00 |