Atomic-scale in situ TEM investigation of electron beam-induced repair of multiple defects in α-Ga2O3 heterogeneous epitaxial single-crystal films

Journal:

Applied Physics Letters

Published:

2025-09-30

DOI:

10.1063/5.0268848

Affiliations:

4

Authors:

12

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Institutions	Authors	Share
Xidian University, China	5.500000	0.46
National Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology, Xidian University, China	5.500000	0.46
Xi'an University of Posts and Telecommunications (XUPT), China	1.000000	0.08

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