Electron transport in N-polar AlGaN:Si films grown by MOVPE on annealed and sputtered AlN templates

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0270337
Affiliations:
3
Authors:
4
Institutions Authors Share
Mie University, Japan
2.500000
0.63
State Key Laboratory of Integrated Optoelectronics, NENU, China
1.500000
0.38