Fabrication of metal air bridges for superconducting circuits using two-photon lithography

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0271788
Affiliations:
5
Authors:
6
Institutions Authors Share
University of Maryland (UMD), United States of America (USA)
3.166667
0.53
Laboratory for Physical Sciences (LPS), UMD, United States of America (USA)
2.833333
0.47