Sc0.2Al0.8N Lamb wave filter with a high temperature stability using the strategy of double-layer SiO2 and groove structure

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0271904
Affiliations:
3
Authors:
11
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Institutions Authors Share
Wuhan University (WHU), China
9.500000
 0.86
MOE Key Laboratory of Artificial Micro- and Nano-structures, WHU, China
1.000000
 0.09
Wuhan Institute of Quantum Technology, China
0.500000
 0.05
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