AlN/AlScN composite film bulk acoustic wave filters for 5G bands

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0276488
Affiliations:
3
Authors:
4
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Institutions Authors Share
State Key Laboratory of Luminescent Materials and Devices (SKLLMD), SCUT, China
3.333333
 0.83
Guangzhou FLCT Communication Technology Co., Ltd., China
0.333333
 0.08
Zhejiang University (ZJU), China
0.333333
 0.08
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