Effects of plasma treatments on Ohmic formation for N polarity of n+-GaN substrates

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0278116
Affiliations:
3
Authors:
7
Institutions Authors Share
State Key Laboratory of Radio Frequency Heterogeneous Integration, China
5.000000
0.71
Red and Blue Microelectronics (Shanghai) Co., Ltd, China
1.000000
0.14
Unilumin Group, China
1.000000
0.14