Atomic layer deposition and characterization of scandium aluminum nitride
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0278222
- Affiliations:
- 2
- Authors:
- 7
| Institutions | Authors | Share |
|---|---|---|
| University of Michigan (U-M), United States of America (USA) | 1.00 |