Physical patterning of high-Q superconducting niobium resonators via ion beam etching

Journal:

Applied Physics Letters

Published:

2025-09-01

DOI:

10.1063/5.0278956

Affiliations:

5

Authors:

12

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Institutions	Authors	Share
New York University (NYU), United States of America (USA)	4.000000	0.33
Booz Allen Hamilton Inc., United States of America (USA)	3.000000	0.25
Brookhaven National Laboratory (BNL), United States of America (USA)	2.000000	0.17
USAF Air Force Research Laboratory (AFRL), United States of America (USA)	2.000000	0.17
University of Maryland (UMD), United States of America (USA)	1.000000	0.08

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