Enhanced polarization switching and reliability in BEOL-compatible HZO/ZrO2/HZO stack under low-voltage operation

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0280876
Affiliations:
4
Authors:
12
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Institutions Authors Share
Fudan University, China
11.416667
11.416667
 0.95
Shaoxin Laboratory, China
0.583333
 0.05
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