Discharge similarity in capacitive radio frequency carbon tetrafluoride plasmas

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0281351
Affiliations:
7
Authors:
10
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Institutions Authors Share
Department of Electrical Engineering, Tsinghua, China
3.333333
 0.33
Ruhr University Bochum (RUB), Germany
2.000000
 0.20
HUN-REN Institute for Solid State Physics and Optics (SZFKI), Hungary
2.000000
 0.20
Tsinghua University, China
1.000000
 0.10
MOE Laboratory of Materials Modification by Laser, Ion and Electron Beams, DUT, China
1.000000
 0.10
State Key Laboratory of Power System Operation and Control, Tsinghua, China
0.333333
 0.03
Tsinghua-Sichuan Energy Internet Research Institute, China
0.333333
 0.03
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