Geometry-engineered spring-shaped silicon nanowires for directional airflow sensing on flexible substrates

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0283844
Affiliations:
3
Authors:
10
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Institutions Authors Share
Yangzhou University (YZU), China
7.000000
 0.70
Nanjing National Laboratory of Microstructures (NNLM), NJU, China
3.000000
 0.30
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