The effect of O2 high-temperature annealing on the quality of Al2O3/Ga2O3 interface
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0284936
- Affiliations:
- 1
- Authors:
- 6
| Institutions | Authors | Share |
|---|---|---|
| State Key Laboratory of Radio Frequency Heterogeneous Integration, China | 1.00 |