Effects of nitrogen passivation on the capture cross section energy distribution of 4H-SiC/SiO2 interface defects and the temperature dependences of leakage current

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0285027
Affiliations:
4
Authors:
12
Institutions Authors Share
College of Physics, SCU, China
6.500000
0.54
Sichuan University (SCU), China
2.500000
0.21
Sichuan Xu Mao Micro Technology, China
2.000000
0.17
China Academy of Engineering Physics (CAEP), China
1.000000
0.08