Thickness-dependent retention–endurance trade-off in scaled Hf0.5Zr0.5O2 ferroelectric capacitor

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0286413
Affiliations:
5
Authors:
5
Institutions Authors Share
Moscow Institute of Physics and Technology - State University (MIPT), Russia
3.500000
0.70
CONMET, Russia
0.500000
0.10
National Research Center Kurchatov Institute (NRCKI), Russia
0.333333
0.07
Technical Institute for Superhard and Novel Carbon Materials (FSBI TISNCM), Russia
0.333333
0.07
A.V. Topchiev Institute of Petrochemical Synthesis (TIPS), RAS, Russia
0.333333
0.07