Kinetic and electronic properties of surface steps on 4H-SiC epitaxial layers
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0287148
- Affiliations:
- 3
- Authors:
- 5
| Institutions | Authors | Share |
|---|---|---|
| State Key Laboratory of Silicon and Advanced Semiconductor Materials, ZJU, China | 0.40 | |
| Zhejiang University (ZJU), China | 0.40 | |
| Zhejiang Sci-Tech University (ZSTU), China | 0.20 |