Low-temperature synthesis of Al-rich rock salt Cr1−xAlxN films with selective metal ion bombardment by synchronized substrate bias pulsing

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0287938
Affiliations:
4
Authors:
6
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Institutions Authors Share
Linköping University (LiU), Sweden
3.833333
 0.64
Uppsala University (UU), Sweden
1.833333
 0.31
Rensselaer Polytechnic Institute (RPI), United States of America (USA)
0.333333
 0.06
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