Enhancing the electrical performance and stability of Hf-doped InZnO thin film transistors using dual-target co-sputtering technique
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0289388
- Affiliations:
- 4
- Authors:
- 5
| Institutions | Authors | Share |
|---|---|---|
| Xinjiang University (XJU), China | 0.40 | |
| Wuhan University of Science and Technology (WUST), China | 0.20 | |
| State Key Laboratory of Integrated Chip and System, Fudan University, China | 0.20 | |
| Hunan University (HNU), China | 0.20 |