Defect evolution in proton-irradiated 4H-SiC

Journal:

Applied Physics Letters

Published:

2025-11-17

DOI:

10.1063/5.0289493

Affiliations:

5

Authors:

5

Go to article

Institutions	Authors	Share
Zhejiang University (ZJU), China	1.900000	0.38
ZJU-Hangzhou Global Scientific and Technological Innovation Center, China	1.700000	0.34
State Key Laboratory of Silicon and Advanced Semiconductor Materials, ZJU, China	1.200000	0.24
Shangyu Institute of Semiconductor Materials, China	0.200000	0.04

Interested in Macromolecular and Materials Chemistry?