Stress engineering in ferroelectric hafnium oxide for tuning epitaxial orientation
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0292944
- Affiliations:
- 2
- Authors:
- 12
| Institutions | Authors | Share |
|---|---|---|
| Hebei Medical University (HEBMU), China | 1.00 |