Temperature-dependent Raman spectroscopic studies of AlN epi-films by metal-organic chemical vapor deposition

Journal:

Applied Physics Letters

Published:

2025-10-20

DOI:

10.1063/5.0295710

Affiliations:

7

Authors:

9

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Institutions	Authors	Share
Kennesaw State University (KSU), United States of America (USA)	4.500000	0.50
Guangxi University (GXU), China	3.000000	0.33
Institute of Semiconductors (IOS), CAS, China	0.750000	0.08
Science Exploring Lab, United States of America (USA)	0.500000	0.06
MOE Key Laboratory of New Processing Technology for Nonferrous Metals and Materials, China	0.250000	0.03

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