Three-dimensional imaging of CMOS image sensor pixel structures using ptychographic x-ray computed tomography in the tender x-ray regime

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0297526
Affiliations:
5
Authors:
7
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Institutions Authors Share
Tohoku University, Japan
4.166667
 0.60
RIKEN SPring-8 Center (RSC), Japan
2.583333
 0.37
WPI Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, Japan
0.250000
 0.04
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