High-Q membrane resonators using ultra-high-stress crystalline TiN films

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0300550
Affiliations:
5
Authors:
9
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Institutions Authors Share
The University of Tokyo (UTokyo), Japan
3.000000
 0.33
RIKEN Center for Quantum Computing (RQC), Japan
3.000000
 0.33
National Institute of Information and Communications Technology (NICT), Japan
2.000000
 0.22
IBM Research - Tokyo, Japan
1.000000
 0.11
Inamori Foundation, Japan
0.000000
 0.00
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