Wafer-scale epitaxial growth of AlN (0001) on heteroepitaxial diamond (111)

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0302996
Affiliations:
3
Authors:
10
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Institutions Authors Share
Fraunhofer Institute for Applied Solid State Physics (IAF), Germany
7.500000
 0.75
Diamond Materials GmbH, Germany
2.000000
 0.20
Silicon Austria Labs (SAL), Austria
0.500000
 0.05
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