Highly accurate classification of material types from spectroscopic ellipsometry heatmap measurements using deep learning
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0303070
- Affiliations:
- 4
- Authors:
- 6
| Institutions | Authors | Share |
|---|---|---|
| Gifu University, Japan | 0.33 | |
| National Institute of Advanced Industrial Science and Technology (AIST), Japan | 0.33 | |
| J.A. Woollam Co. Inc., United States of America (USA) | 0.17 | |
| Rohm Co., Ltd., Japan | 0.17 |