Effects of oxygen thermal annealing on AlN trench metal-semiconductor field-effect transistors (MESFETs) on single-crystal AlN substrates

Journal:: Applied Physics Letters
Published:: 2025-12-08
DOI:: 10.1063/5.0304969
Affiliations:: 2
Authors:: 6

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Institutions	Authors	Share
Arizona State University (ASU), United States of America (USA)	5.500000	0.92
Texas State University - San Marcos, United States of America (USA)	0.500000	0.08

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