Thermal conductivity-based gas sensing utilizing multi-threshold MEMS switches: Helium as a case study

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0305179
Affiliations:
1
Authors:
2
Go to article
Institutions Authors Share
State University of New York at Binghamton (SUNY Binghamton), United States of America (USA)
2.000000
 1.00
Interested in Analytical Chemistry?