Impact of graded doping transition layer on structural properties of Zr-doped AlN epilayers

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0305250
Affiliations:
2
Authors:
6
Institutions Authors Share
Texas Tech University (TTU), United States of America (USA)
4.000000
0.67
The University of New Mexico (UNM), United States of America (USA)
2.000000
0.33