Enhanced ferroelectric endurance in ScAlN by interfacial oxide reconstruction

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0305289
Affiliations:
7
Authors:
17
Institutions Authors Share
Peking University (PKU), China
7.166667
0.42
State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, PKU, China
6.833333
0.40
Beijing Information Science and Technology University (BISTU), China
1.000000
0.06
Suzhou Laboratory, China
1.000000
0.06
Peking University Yangtze Delta Institute of Optoelectronics, China
0.500000
0.03
Collaborative Innovation Center of Quantum Matter (CICQM), China
0.500000
0.03