Improved uniformity of nanoscale phase change material pitch line for high-density data storage

Journal:

Applied Physics Letters

Published:

2026-03-23

DOI:

10.1063/5.0308451

Affiliations:

3

Authors:

11

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Institutions	Authors	Share
State Key Laboratory of Materials for Integrated Circuits, SIMIT CAS, China	7.000000	0.64
Shanghai Integrated Circuit Research and Development Center (ICRD), China	3.000000	0.27
University of Chinese Academy of Sciences (UCAS), China	1.000000	0.09

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