214 MW/cm2 vertical β-Ga2O3 UMOSFETs enabled by HF sidewall treatment

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0310882
Affiliations:
4
Authors:
15
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Institutions Authors Share
University of Science and Technology of China (USTC), China
8.000000
 0.53
Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS, China
7.000000
 0.47
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