Self-compensation of temperature drift for MEMS resonant pressure sensors based on dynamic Joule heating modulation
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0312145
- Affiliations:
- 1
- Authors:
- 5
| Institutions | Authors | Share |
|---|---|---|
| Xiamen University (XMU), China | 1.00 |