Interpretation of ferroelectric behavior in AlScN films with TiN and Ta bottom electrodes

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0312701
Affiliations:
6
Authors:
11
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Institutions Authors Share
Institute of Science Tokyo (Science Tokyo), Japan
7.000000
 0.64
National Sun Yat-Sen University (NSYSU), Taiwan
4.000000
 0.36
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