High-sensitivity pressure sensing via frequency modulation in layer-transferred AlN membrane resonators
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0315908
- Affiliations:
- 2
- Authors:
- 4
| Institutions | Authors | Share |
|---|---|---|
| Georgia Institute of Technology (Georgia Tech), United States of America (USA) | 0.75 | |
| The Pennsylvania State University (Penn State), United States of America (USA) | 0.25 |