Mechanism of point-defect-driven evolution in ferroelectricity of AlScN films

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0316749
Affiliations:
3
Authors:
8
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Institutions Authors Share
MOE Laboratory of Materials Modification by Laser, Ion and Electron Beams, DUT, China
5.000000
 0.63
Suzhou Laboratory, China
2.000000
 0.25
Dalian University of Technology (DUT), China
1.000000
 0.13
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