Mechanism of point-defect-driven evolution in ferroelectricity of AlScN films
- Journal:
- Applied Physics Letters
- Published:
- DOI:
- 10.1063/5.0316749
- Affiliations:
- 3
- Authors:
- 8
| Institutions | Authors | Share |
|---|---|---|
| MOE Laboratory of Materials Modification by Laser, Ion and Electron Beams, DUT, China | 0.63 | |
| Suzhou Laboratory, China | 0.25 | |
| Dalian University of Technology (DUT), China | 0.13 |