Advanced null ellipsometry for ultrathin film thickness measurement

Journal:
Applied Physics Letters
Published:
DOI:
10.1063/5.0319919
Affiliations:
2
Authors:
7
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Institutions Authors Share
State Key Laboratory of Precision Measuring Technology and Instruments, China
5.000000
 0.71
National Institute of Metrology (NIM), China
2.000000
 0.29
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